摘要
通过液－固逐步溶解缩聚的方法，合成了几种有较高分子量的光敏聚酰胺酸酯（ＰＩ前体），并对它们的光刻性能进行了研究和讨论。其中，米蚩酮或双叠氮对以联苯二酐、间苯二胺残基为主链结构的光敏ＰＩ前体的感光性能有最大的影响，由这种ＰＩ前体配制的光敏聚酰亚胺光刻胶具有最高的灵敏度。同时，本文也对这些ＰＩ前体的热酰亚胺化反应做了一些有益的探讨。
Several kinds of photosensitive polyamic acid ester (photo-PAE) with higher molecular weight were prepared by dissolution-condensation on the liquid-solid interface. The relationship between sensitivity and sensitizer as well as photocrosslinking agent was investigated. Meanwhile, the thermal imidizations of these PI precusors were also studied here by means of TGA and FIR analyses.
出处
《功能高分子学报》
CAS
CSCD
1999年第1期1-5,共5页
Journal of Functional Polymers
关键词
光敏聚酰亚胺
聚酰胺酸酯
光刻胶
PSPI
photosensitive polyimide
polyamic acid ester
photolithography
sensitizer and photocrosslinking agent
