摘要
溅射离子泵漏磁是评价离子泵性能的重要指标之一,其影响着离子泵的抽气性能。针对电镜等特殊应用领域,也要减少漏磁对电子枪的磁影响。通过增加磁屏蔽结构,可以有效减少磁场的泄漏。本文以一种离子泵为例,通过对比测试不同的磁屏蔽结构(U形顶磁屏蔽、蝶形顶磁屏蔽、全包侧磁屏蔽、底磁屏蔽),可以得出,U形顶磁屏蔽结构是其中磁屏蔽效果最优的结构。
The leakage magnetic field of sputtering ion pump is one of the important indicators for evaluating the performance of ion pumps,which affects the pumping performance of ion pump.For special application fields such as electron microscopy,the magnetic influence of leakage magnetic field on the electron gun should also be reduced.By adding magnetic shielding structures,the leakage magnetic field can be effectively reduced.In this paper,a certain type of ion pump is taken as an example.Through comparative tests of different magnetic shielding structures(U-shaped top magnetic shielding,butterfly-shaped top magnetic shielding,full-side magnetic shielding,bottom magnetic shielding),it can be concluded that the U-shaped top magnetic shielding structure is the optimal structure for magnetic shielding.
作者
张颖志
李冬
汪良
袁方
叶琳琳
ZHANG Yingzhi;LI Dong;WANG Liang;YUAN Fang;YE Linlin(SKY Technology development Co.,Ltd.,Chinese Academy of Sciences,Shenyang 110000,Liaoning,China)
出处
《工程与试验》
2025年第3期82-85,共4页
Engineering and Test
关键词
溅射离子泵
漏磁
磁屏蔽
U形顶磁屏蔽
sputtering ion pump
leakage magnetic field
magnetic shielding
U-shaped top magnetic shielding
