摘要
随着半导体产业技术的不断升级,全球电子特气市场规模也在持续增长。磷烷作为一种N型掺杂剂,在半导体制造领域具有重要意义,其纯度直接影响着半导体器件的性能。对此,市场对磷烷的纯度要求也在不断提高,高纯磷烷气的制备方法也备受业界关注。主要介绍了国内外现存电子级磷烷的合成和纯化方法,同时对其工业应用的可行性进行总结。旨在加强行业内研究人员的交流,促进我国电子级磷烷行业的发展。
With the continuous upgrading of semiconductor industry technology,the global electronic specialty gas market size also shows continuous growth.As an N\|type dopant,phosphine is of great significance in the field of semiconductor manufacturing,and its purity directly affects the performance of semiconductor devices.Therefore,the market requirements for the purity of phosphine are further improved,and the preparation method of high\|purity phosphine gas has also attracted much attention in the industry.This paper mainly introduces the synthesis and purification methods of existing electronic grade phosphine at home and abroad,and also summarizes the feasibility of its industrial application.It aims to strengthen the communication among researchers in the industry and promote the development of the electronic grade phosphine industry in China.
作者
田玉博
祝全仁
何红振
赵鹏德
袁胜芳
牛鹏飞
张金彪
TIAN Yubo;ZHU Quanren;HE Hongzhen;ZHAO Pengde;YUAN Shengfang;NIU Pengfei;ZHANG Jinbiao(Haohua Gas Co.,Ltd.,Luoyang 471000,China)
出处
《低温与特气》
2025年第4期1-5,29,共6页
Low Temperature and Specialty Gases
关键词
电子特气
磷烷
合成
纯化
electronic specialty gas
phosphine
synthesis
purification
