摘要
在微小位移测量过程中,针对传统机械卡尺无法满足军事装备制造时精度高、速度快的测量问题,基于容栅技术,采用CanSemi0.18μm工艺,设计并实现了一种用于测量位移的数显卡尺数据处理专用芯片.该芯片集成容栅传感器驱动、数据解调、计数、鉴相、累加、运算器和控制器等模块,简化了容栅卡尺外围电路设计.累加电路的增加,提高了芯片的运算速度;同时减小了制造误差对测量的影响,提高了产品的适应性.利用固件消抖,提高了芯片的抗干扰能力.仿真结果及流片测试结果表明,该芯片的测量精度为0.01mm,最大位移速度为6m/s,最大位移距离可达10.4m,提高了位移数据处理专用芯片的最大位移速度和距离.
In the process of micro-displacement measurement,the traditional mechanical caliper cannot meet the measurement requirements of high precision and fast speed during the manufacturing of military equipment.In view of this problem,the paper relies on the capacitive grating technology,and uses CanSemi 0.18μm process to design and implement a digital caliper data processing application specific integrated circuit(ASIC)chip for mea-suring displacement.This chip integrates modules such as capacitive grating sensor drive,data demodulation,counting,phase detection,accumulation,arithmetic unit and controller,simplifying the peripheral circuit design of capacitive grating caliper.The addition of the accumulation circuit enhances the computing speed of the chip,and at the same time,reduces the influence of the manufacturing error on measurement,and improves the adaptability of the product.Firmware is employed to eliminate jitter and improve the anti-interference ability of the chip.The simulation and tape-out test results show that the measurement accuracy of the chip is 0.01 mm,with the maxi-mum displacement speed of 6 m/s,and the maximum displacement distance of up to 10.4 m,which improves the maximum displacement speed and distance of the ASIC chip for displacement data processing.
作者
郭甜甜
赵海
葛辛
戚祎
倪屹
GUO Tiantian;ZHAO Hai;GE Xin;QI Yi;NI Yi(School of Integrated Circuits,Jiangnan University,Wuxi 214122,China;Jiangsu Luojia Juxin Integrated Circuit Design Co.,Ltd.,Wuxi 214122,China)
出处
《空天预警研究学报》
2025年第4期299-303,共5页
JOURNAL OF AIR & SPACE EARLY WARNING RESEARCH
关键词
容栅传感器
数显卡尺
位移测量
鉴相式
集成电路
capacitive gate transducer
digital caliper
displacement measurement
phase discriminator type
integrated circuit
