摘要
阐述数字微镜技术,基于数字微镜器件的光刻机特性,包括降低掩模成本、减小曝光关键尺寸CD,探讨基于数字微镜器件的光刻机技术应用。
This paper describes the digital micromirrortechnology, the characteristics of the lithography machine based on the digital micromirror device, including reducing the mask cost, reducing the key exposure size CD, and discusses the application of the technology of the lithography machine based on the digital micromirror device.
作者
薛瑞
XUE Rui(Applied Materials(Xi'an)Co.,Ltd.,Shaanxi 710119,China.)
出处
《集成电路应用》
2022年第10期20-22,共3页
Application of IC
关键词
数字微镜器件
掩模板
数字光刻
屏幕编号
digital micromirror device
mask
digital lithography
screen numbering
