摘要
针对数字微镜器件(digital micromirror device,DMD)衍射效应对系统成像影响严重的问题,对DMD元件产生的杂散光进行研究。基于严格耦合波理论构建了DMD衍射模型,分析不同波段和入射角度对其衍射效率的影响,分析结果表明,在长波红外波段DMD衍射效应较明显,且随着入射角度增大,DMD衍射效应更为显著。分析投影系统中DMD的衍射杂光产生途径,通过改变系统的F数来控制入射角度,计算出DMD衍射效应产生的杂光能量占比,给出不同波长下,不同F数的光学系统杂光随衍射效应的变化曲线,即F数越大,DMD衍射效应对系统杂光影响越小。
Aiming at the problem that diffraction effect of digital micro-mirror device(DMD)has serious influence on system imaging,the stray light generated by DMD device was studied.Firstly,based on the rigorous coupled wave theory,the DMD diffraction model was constructed and the effects of different bands and incident angles on its diffraction efficiency were analyzed.It was concluded that the diffraction effect of DMD was more obvious in the long-wave infrared band,and the diffraction effect of DMD was more significant with the increase of incident angle.Secondly,the generation methods of diffracted stray light of DMD in the projection system was analyzed.By changing the number of F in the system,the incident angle was controlled,and then the energy proportion of stray light generated by the diffraction effect of DMD was calculated.Finally,the curve of the optical system with different number of F at different wavelengths along with the diffraction effect was obtained.The results show that the larger the F number,the smaller the influence of DMD diffraction effect on stray light.
作者
袁夕尧
胡源
黄蕴涵
许熠宸
秦铭泽
李文轩
YUAN Xiyao;HU Yuan;HUANG Yunhan;XU Yichen;QIN Mingze;LI Wenxuan(School of Opto-Electronic Engineering,Changchun University of Science and Technology,Changchun 130022,China;Key Laboratory of Opto-Electronic Measurement and Optical Information Transmission Technology(Ministry of Education),Changchun 130022,China)
出处
《应用光学》
CAS
CSCD
北大核心
2021年第4期630-635,共6页
Journal of Applied Optics
基金
国家重点研发计划(2016YFF0101902)。
关键词
数字微镜器件
衍射效应
严格耦合波理论
杂散光分析
digital micro-mirror device
diffraction effect
rigorous coupled wave theory
stray light analysis
