摘要
多晶硅生产过程中的氯硅烷属于危险化学品,为保证物料输送过程中不出现任何泄漏,一般选用屏蔽泵。本文介绍了屏蔽泵的结构,简述了屏蔽泵在多晶硅行业的使用情况,分析了屏蔽泵的常见故障,对故障的表现形式和原因进行了统计和分析,指出了屏蔽泵故障与物料及生产操作的关系,最后提出了在设备布置、设计选型和生产使用等方面的一些改进措施,以保证屏蔽泵的安全稳定运行。
Chlorosilane in polysilicon production process belongs to hazardous chemicals.In order to ensure that there is no leakage in the material transportation process,shield pump is generally selected.This paper introduces the structure of the shield pump,briefly describes the use of the shield pump in the polysilicon industry,analyzes the common faults of the shield pump,makes statistics and Analysis on the forms and causes of the faults,points out the relationship between the faults of the shield pump and the materials and production operation,and finally puts forward some improvement measures in the aspects of equipment layout,design and selection,production and use,so as to ensure that Safe and stable operation of canned motor pump.
作者
曾晓国
张晓伟
万烨
ZENG Xiao-guo;ZHANG Xiao-wei;WAN Ye
出处
《中国有色冶金》
CAS
北大核心
2021年第2期64-67,共4页
China Nonferrous Metallurgy
关键词
多晶硅
氯硅烷
屏蔽泵
故障分析
改进措施
polysilicon
Chlorosilane
shield pump
fault analysis
improvement measures
