摘要
主要针对多晶硅生产过程的副产物二氯二氢硅在还原、氢化、反歧化等工序中的应用进行研究,以期通过合适的处理方法提高多晶硅生产过程中的原料利用率并进一步降低多晶硅的生产成本。
For the application of the byproduct dichlorosilane which is generated in the polycrystalline silicon production in the operation units of reduction,hydrogenation,anti-disproportionation and so on is researched,and with a proper treatment method,the raw material utilization ratio in the process of polycrystalline silicon production is increased and the production cost of polycrystalline silicon is further reduced.
出处
《有色冶金节能》
2014年第3期53-55,58,共4页
Energy Saving of Nonferrous Metallurgy
关键词
多晶硅
二氯二氢硅
反歧化
冷氢化
还原
polycrystalline silicon
dichlorosilane
anti-disproportionation
hydrogenation
reduction
