摘要
以集成电路的特征尺寸和工艺水平为分类标准,将标准手册中的可靠性预计模型与实际的加速寿命试验数据进行结合,得到集成电路可靠性预计修正方法。通过此可靠性预计修正方法,能计算出集成电路的工艺修正系数数值,进而应用于可靠性预计模型之中,对集成电路可靠性预计方法进行修正。修正后的可靠性预计方法能够更加准确的对其可靠性进行预计,解决了现有标准手册模型不能完全准确体现出制造工艺发展的实际问题。
This paper takes the characteristic size and process level of integrated circuit as the classification standard,combines the reliability prediction model in the standard manual with the actual accelerated life test data,and obtains the reliability prediction correction method of integrated circuit.Through this method,the tech no logical factors of IC can be calculated and then applied to correct the reliability prediction model.The modified reliability prediction method can predict the reliability of IC more accurately.It solves the practical problem that the existi ng stan dard manual model can not fully reflect the development of manufacturing process.
作者
高成
王长鑫
黄姣英
曹阳
GAO Cheng;WANG Changxin;HUANG Jiaoying;CAO yang(School of Reliability and System Engineering,Beihang University,Beijing,100191,China.)
出处
《集成电路应用》
2019年第8期1-4,共4页
Application of IC
基金
国家微电子预研课题(31513050304)集成电路硬件木马攻防示范研究
关键词
集成电路
可靠性预计
加速退化试验
特征尺寸
integrated circuit
reliability prediction
accelerated degradation test
characteristic size
