摘要
以钛酸正丁酯、正硅酸乙酯为前驱体,在薄膜设计软件的辅助下,采用溶胶-凝胶法在K9光学玻璃上制备了λ/4-λ/2-λ/2膜系宽带减反膜。该膜层的光学性能良好,在500~900 nm波长范围内的平均透过率为99.25%,透过率增益随入射角增加而增大,斜入射光入射角从0°增至60°仍能有效覆盖钕玻璃的主吸收峰,此时平均透过率增益从7.2%增至10.2%;在150℃下进行热处理后,膜层具有一定的耐擦拭性能,表面均匀性良好,均方根粗糙度为4.00 nm。
Based on the coating design software, a type of λ/4-λ/2-λ/2 tri-layer broadband antireflective coating was deposited on the K9 substrate via sol-gel dip coating using tetrabutylorthotitanate and tetraethoxysilane as precursors. A broadband antireflective coating with a high average transmission of 99. 25%(500-900 nm) was obtained, and the transmittance gain increased with the increasing incident angle. The main absorption peak of the Nd glass could be effectively covered even at an oblique incident angle range of 0°-60°, increasing the average transmittance gain from 7.2% to 10.2%. After heat treatment at 150, the film had a certain rubbing resistance and good surface uniformity with a root mean square roughness of 4.00 nm.
作者
熊怀
唐永兴
胡丽丽
沈斌
李海元
Xiong Huai;Tang Yongxing;Hu Lili;Shen Bin;Li Haiyuan(Key Laboratory of High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences , Shanghai 201800, China;Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China;Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics , Chinese Academy of Sciences, Shanghai 201800, China)
出处
《中国激光》
EI
CAS
CSCD
北大核心
2019年第7期136-142,共7页
Chinese Journal of Lasers
关键词
材料
溶胶-凝胶法
减反膜
膜层设计
薄膜
materials
sol-gel method
antireflection coatings
coating design
thin films
