摘要
采用多靶磁控共溅射技术的单靶功率可调特点,在Zr-4合金基底上,通过调节O_2流量制备出(AlCrMoNbZr)_(1-x-y)N_yO_x高熵合金涂层。利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、原子力显微镜(AFM)、纳米压痕仪(nanoindentation)以及电化学工作站等对不同O_2流量下制备的(AlCrMoNbZr)_(1-x-y)N_yO_x高熵合金涂层,进行了微观结构、形貌、纳米硬度以及耐腐蚀性能进行了表征与测试。结果表明,在O_2氛围作用下,涂层相结构由fcc完全转变为bcc结构;随O_2流量由0 mL/min增至15 mL/min,涂层纳米硬度由22 GPa快速降低至7 GPa;O_2流量为10 mL/min的(AlCrMoNbZr)_(1-x-y)N_yO_x高熵合金涂层表现出优异的耐腐蚀性能,其腐蚀电流密度较O_2流量为0 mL/min的(AlCrMoNbZr)N涂层降低约6倍。
In this paper,the single target power adjustable characteristics of multi target magnetron co-sputtering technology were adopted.(AlCrMoNbZr)1-x-yNyOxhigh entropy alloy coatings were deposited on Zr-4 substrates by adjusting O2 flow rate.X-ray diffraction(XRD),scanning electron microscope(SEM),atomic force microscope(AFM),nano-indentation and electrochemical workstation were used to characterize the microstructure,morphology,nano-hardness and corrosion resistance of the(AlCrMoNbZr)1-x-yNyOxhigh entropy alloy coating with different O2 flow.The results showed that the phase structure of the coating was completely transformed from fcc to bcc and maintained a stable bcc structure with the increase of O2 flow from 0 to15 mL/min.The coating nano-hardness decreased from 22 to 7 GPa with the increase of O2 flow.The(AlCrMoNbZr)1-x-yNyOxhigh entropy alloy coating with O2 flow of10 mL/min exhibited excellent corrosion resistance,and its corrosion current density was about 6 times lower than that of the(AlCrMoNbZr)N coating with O2 flow rate of 0 mL/min.
作者
常鸿
赵莎
刘春海
CHANG Hong;ZHAO Sha;LIU Chunhai(Southwestern Institute of Physics,Chengdu 610064,China;College of Materials and Chemistry & Chemical Engineering,Chengdu University of Technology,Chengdu 610059,China)
出处
《功能材料》
EI
CAS
CSCD
北大核心
2019年第4期4174-4179,共6页
Journal of Functional Materials
基金
国家自然科学基金青年基金资助项目(51201111)
关键词
磁控共溅射
高熵合金涂层
微结构
纳米硬度
耐腐蚀性能
magnetron sputtering
high entropy alloy coating
microstructure
nanometer hardness
corrosion resistance
