摘要
针对现有膜厚监控系统的双平行光路系统和监测光直接照射单色仪入射狭缝的结构 ,提出了四光路透镜成像系统 ,同时采用光纤传光 .实验表明它提高了膜厚监控的稳定性和精度 ,并有较高的性能价格比 .此外从理论上对多光路透镜成像系统的设计和调校进行了定量分析 .
With regard to the dual-optical path system and the structure that directly exposes monochromator pre-slit to monitoring light in current thin-film thickness monitoring control system, a quart-optical path lens imaging system and optical fibre are proposed. The experiments show that monitoring control precision and stability are increased using this design, and the property-to-price ratio is very high. Finally, design theory and regulation theory of lens imaging system with quart-optical path are formulated.
出处
《物理实验》
北大核心
2002年第10期12-16,共5页
Physics Experimentation
基金
兵器工业科研基金项目 (编号 2 2 96 82 - 3)
