摘要
用射频—直流辉光放电PECVD法在KCl透镜上沉积了非晶结构的类金刚石碳膜 测量显示镀覆了类金刚碳膜的KCl透镜在 2 .5 μm～ 5 0 μm红外范围内具有高增透作用
Amorphous diamond like carbon films on KCl lens were prepared with rf cd PECVD method. The measurement shows that the lens with the films has a high transmission in the infrared range between 2.5μm～50μm. The infrared spectrum anlysis shows that the SP 3 bond is the main bonding.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2002年第9期1132-1134,共3页
Acta Photonica Sinica
