摘要
采用熔拉 -腐蚀复合方法 ,将普通单模石英光纤制成直锥形光纤探针。利用自制工具将探针打弯 ,制成悬臂式光纤探针 ,在AFM上取得了较理想的测试结果。将自制光纤探针和商用硅材料探针获得的两种扫描图像进行了对比 。
A practical and simple method to fabricate the cantilever optical fiber probe for AFM is presented. First, an optical fiber straight tapered probe is produced in pulling-etching method, followed to shape into the cantilever probe by heating with CO 2 laser beam. After coating tip with aluminum, the probe is applied to AFM. The scanning image botained is satisfied, and is compared with image of commercial silica cantilever probe.
出处
《光学技术》
CAS
CSCD
2002年第5期398-400,共3页
Optical Technique
基金
国家自然科学基金资助项目 (项目号 :698770 1 4 )
关键词
原子力显微镜
悬臂光纤探针
光学偏转法
atomic force microscopy
cantilever optical fiber probe
optic deflection method
