摘要
使用ANSYS有限元分析软件对多层导电结构测厚传感器进行仿真分析,建立了较理想的物理模型以及激励频率、激励电压、线圈匝数等各项参数。在频率、线圈匝数等参数确定的情况下,通过改变被测体厚度仿真出被测体厚度与激励电压的对应关系,确定了拟合公式,通过仪器验证了仿真的正确性。
Using the finite element analysis software of ANSYS to simulation analyze on multi-layered conductive structure thickness measurement sensor. Simulate better physical model in theory as well as excitation frequency,excitation parameters such as voltage,coil number of turns. In cases of parameters such as frequency,coil number of turns are determined,by changing thickness,simulate corresponding relation of the measured body thickness and excitation voltage,fitting out corresponding formula,verify the correctness of the simulation through instrument.
作者
肖俊生
杜志杰
王志春
XIAO Jun-sheng, DU Zhi-jie, WANG Zhi-chun(College of Information Engineering, Inner Mongolia University of Science and Technology, Baotou 014010, Chin)
出处
《传感器与微系统》
CSCD
2018年第3期26-28,31,共4页
Transducer and Microsystem Technologies
基金
内蒙古自治区自然科学基金资助项目(2014MS0609)
国家自然科学基金资助项目(61463041)
包头市科技计划资助项目(2014Z1010-4)
关键词
电涡流传感器
厚度测量
仿真
eddy current sensor
thickness measurement
simulation
