摘要
回顾和评述了柔性衬底氧化物透明导电膜 (包括锡掺杂的三氧化二铟ITO薄膜、铝掺杂的氧化锌AZO薄膜等 )的研究进展情况。报道了在柔性衬底上制备的ITO膜、ZnO膜的光电性质对衬底种类、制备工艺以及制备参数的依赖关系 。
The progress in the study on TCO films (including ITO films and AZO films) prepared on organic substrates was reviewed in this paper. It was also reported that the optical and electronic properties of films deposited on flexible substrates depend on substrate types, preparation techniques and parameters. In addition, the future work that should be done in this field was mentioned.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2002年第4期354-356,359,共4页
Journal of Functional Materials
基金
国家自然科学基金资助项目 (698760 2 5
60 0 760 0 6)
山东省科委
山东省自然科学基金资助项目
关键词
柔性衬底
氧化物半导体
透明导电膜
研究进展
flexible substrates
oxide semiconductors
transparent conducting films
