摘要
通过理论模拟与实验相结合,研究了以双层膜的方式实现三波长增透的途径。以正硅酸乙酯为前驱体,采用酸催化与碱催化溶胶混合的方式调控了溶胶折射率,并配制了双层复合膜所用的两种溶胶,制备出了351nm处透过率大于99.5%,527nm透过率大于98%,1053nm透过率大于98%的三波长增透膜。用扫描电镜、原子力显微镜观测了膜层结构,用椭偏仪和分光光度计对膜层性能进行了表征。三波长增透膜对高功率激光装置的运行性能提升起到了积极的促进作用。
Based on simulation and experiment,the way to get three-wavelength antireflective film was researched,A synthesis procedure of SiO2 colloid derived from acid-alkali 2-step catalyzed hydrolysis was disclosed.Two sols were compounded and the three-wavelength antireflective films with transmittances of 351 nm,527nm and 1053 nm by over 99.5%,98% and 98%,were prepared.The properties of the coatings were characterized with TEM,AFM,spectroscopic ellipsometry and spectrophotometer.Three-wavelength antireflective coating on the running performance of high power laser device lifting played a positive role in promoting.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2015年第1期161-164,共4页
High Power Laser and Particle Beams
基金
国家自然科学基金项目(61405180)
关键词
溶胶-凝胶
增透膜
双层膜
三波长增透
sol-gel
antireflective film
two-layer
three-wavelength antireflection
