摘要
陶瓷材料因高硬度和高耐磨性而成为很好的导轨材料,但其加工工艺性比金属材料复杂很多。对陶瓷导轨先进行研磨加工,使面型精度达到微米级,再采用机器人抛光系统对其抛亮,通过平面干涉仪检测其面型精度,根据检测的面型数据及特点,结合相关的抛光工艺,对陶瓷导轨进一步加工,使其达到更高的精度要求。实验过程中,陶瓷导轨面型的峰谷值从2.348 mm降低到1.844 mm,均方根由0.625 mm降低到0.394 mm,面型精度较原先得到了改善。以光学的检测手段结合相关的抛光工艺来提高陶瓷导轨机械加工的精度,结果证明该方案可行。
For the feature of high hardness,high wear resistance and other characteristics,ceramic materials are suitable for guideway. However,considering the complex processability of ceramic materials,it is necessary to adapt new technology of mechanical lapping and polishing,to reduce tiny cracks and stress concentration,and to improve profile accuracy and fatigue resistance. During the processing period,the ceramic guideway is grinded and lapped to achieve micro-level precision,then polished with robots polishing system. The plane face accuracy is detected by the interferometer at the same time. Based on the detected data and polishing process,the ceramic guideway is further processed to achieve higher accuracy. In the process of experiment,the PV value of ceramic guideway face is reduced from 2. 348 mm to1. 844 mm,and the RMS value of ceramic guideway face is reduced from 0. 625 mm to 0. 394 mm. In order to improve the accuracy of ceramic guideway,it is a new way to combine optics detection method with specific polishing technology. The experiment results show that this method is effective.
出处
《实验室研究与探索》
CAS
北大核心
2014年第11期55-57,90,共4页
Research and Exploration In Laboratory
关键词
工业机器人
超精密加工
陶瓷导轨
抛光系统
industrial robot
ultra-precision machining
ceramic guideway
polishing system
