摘要
综述了近年来与微型机电系统（MEMS）相关的材料微制造和微加工技术的最新研究进展.重点介绍了如何利用硅晶片作为微型模具来制备压电陶瓷和热电材料的微型柱状阵列结构和反应烧结碳化硅微型转子等微制造技术,并展望了材料微制造技术在研制微型医疗器件和微型移动能源方面的应用前景.
Recent status of microfabrication technology related to microelectromechanical systems (MEMS) is reviewed with particular emphasis on the introduction of our newly developed three-dimensional microfabrication process using a micromachined silicon wafer as a mold. By using the silicon molding processes, piezoelectric microrod arrays, thermoelectric microelement arrays and silicon carbide micro gas turbine rotors have been successfully fabricated, Their microfabrication processes are described in detail to demonstrate the success of the combination of silicon micromachining and materials processing techniques. The prospects for materials microfabrication in the fields of miniature medical apparatus and portable microscale energy sources are given.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
2002年第4期657-664,共8页
Journal of Inorganic Materials
基金
清华大学骨干人才支持计划
