摘要
我们已经研制出了飞行时间 ＴＯＦ（Ｔｉｍｅ ｏｆ Ｆｌｉｇｈｔ）方法电荷态分布测量系统，并用该系统测定了ＭＥＶＶＡ（ＭｅｔａｌＶ ｐｏｒ Ｖａｃｕｕｍ Ａｒｃ）源产生离子的电荷态分布。在实验中，把ＭＥＶＶＡ源作为产生离子的手段；ＭＥＶＶＡ源是一种新型的离子源，该源阴极材料及运行条件较宽，能够产生强流的多电荷态离子。电荷态谱是用ＴＯＦ方法获得的，同时也测量了弧流及弧压降。在本文中，将介绍 ＴＯＦ方法测量电荷态的原理、结构和一些初步的实验结果，对 ＭＥＶＶＡ源也作了必要的介绍。
Now we have developed the measurement system of state distribution of the electric charge with TOF method, and use the system to measure the state distribution of electric ion charge from the MEVVA source. In experiment, MEVVA source is used to produce ion, it is a new type of ion source. The cathode material of the source and its operation are wide, so that the source can produce extensive ion with more electric charge. State spectrum of electric charge is obtained with the TOF method. At the same time, the arc current and arc voltage drop can also be measured. In this paper, the principle of the electric charge state measured with the TOF method, structure and the primary experiment results, as well as the MEVVA source.
出处
《真空》
CAS
北大核心
1991年第3期35-40,共6页
Vacuum
