摘要
真空镀膜设备是电子工业元器件生产和研制过程中广泛使用的设备 ,本文就DMF- 70 0电子束真空镀膜设备在实际工作中出现的主要故障进行分析 。
Vacuum coating equipment is widely used in the manufacturing and research of components in electronics industry.The main malfunctions,which occurred in the actual operation of DMF 700 electron beam coating equipment,are analyzed in the paper.Methods of trouble shooting are also presented here.
出处
《光电子技术》
CAS
2002年第2期114-118,共5页
Optoelectronic Technology
