摘要
采用射频辉光放电的方法在含CH的混合气体的常温条件下制备了含碳的薄膜 ,通过Raman、XRD和SEM分析 ,检验了薄膜的性质 ,表明此膜含有大量的碳的SP3 键的金刚石成分 ,其晶粒为 10～ 10 0nm ,属于纳米金刚石膜。此膜已在玻璃镜片。
The coatings were synthesized with gas mixture of containing CH precursor at room temperature by glow discharge.The properties of the coatings were analyzed and tested by Raman,XRD and SEM.It showed that the coatings contained an amount of SP 3 carbon phases and of the grains of 10～100 nanometers may belong to nanoparticle diamond.The coatings are widely used in protecting glasses,plastics and disks and so on.
出处
《真空与低温》
2002年第2期88-89,共2页
Vacuum and Cryogenics
