摘要
本文介绍国内外低压合成金刚石薄膜中对衬底表面预处理的几种典型的工艺方法；探讨衬底表面预处理对低压下合成金刚石薄膜的影响。
Typical techniques of substrate pretreatment of diamond thin film formed under low pressure are introduced, and the effect of substrate pretreatment on deposite diamond thin film is discussed.
出处
《微细加工技术》
1997年第3期66-69,共4页
Microfabrication Technology
关键词
金刚石薄膜
气相沉积
成核密度
diamond thin film
vapor deposition nucleation density
