摘要
室温下采用射频磁控溅射法在有机薄膜-聚丙烯己二酯(polypropyleneadipate,PPA)衬底上制备出了ZnO:Al(AZO)透明导电膜。其它制备参数保持不变的条件下通过改变淀积时间得到厚度不同的薄膜,并对不同厚度AZO薄膜的结构特性、光学特性和电学特性进行了研究。
Al-doped zinc oxide (AZO) films were prepared on polypropylene adipate (PPA) substrates at room temperature by r.f. magnetron sputtering technique. The films of various thicknesses were obtained by varying the depositing time. The optical and electrical properties were studied for AZO samples with different thickness, and the structural properties were also discussed.
出处
《功能材料与器件学报》
CAS
CSCD
2002年第1期8-12,共5页
Journal of Functional Materials and Devices
基金
国家自然科学基金资助项目(No.69876025)
