摘要
在DML—500A离子镀设备中使用热电子发射电极以增强离子化,通过使用这种技术获得致密度更高,质量更好的A1膜,这种A1膜特别适合于保护永久磁铁。
A thermionic emission electrode has been used in DML-500A ion plating unit to enhance ion plating. The Al films with more density and better quality have been formed by using such a technique and are especially suitable for protecting permanent magnet.
出处
《材料保护》
CAS
CSCD
北大核心
1989年第2期28-32,3-4,共5页
Materials Protection
