摘要
对近年来有关溶胶 -凝胶法制备LiNbO3薄膜的研究进行了较详细的综述 ,分析讨论了在溶胶 -凝胶法制备LiNbO3薄膜过程中 ,各主要因素对LiNbO3薄膜制备的影响 ,简要地介绍了LiNbO3薄膜的一些性能 .研究结果表明 ,目前可以用溶胶 -凝胶法在蓝宝石及LiTaO3等基板 (基板的晶格参数与LiNbO3的晶格参数失配较小 )上制备出有光学应用的LiNbO3薄膜 ,制膜的热处理温度通常在 5 0 0℃左右 .讨论了溶胶 -凝胶法制备LiNbO3薄膜过程中存在的主要问题。
The recent researches on LiNbO 3 thin films prepared by sol-gel processes is described in this paper. The main influences of factors, including Li and Nb-raw materials, solvents, stablizers, substrates, viscosity of solutions, methods and technology of coating films, dry and heat treatment of the films, on the formation and properties of LiNbO 3 films are briefly described. It is shown that high_quality LiNbO 3 thin films for optical applications can be prepared on substrates (such as sapphire and LiTaO 3 in which there is small lattice mismatch between substrate) by sol-gel method. The temperature of heat treatment for the films is usually about 500 ℃. The main existing problems in preparing LiNbO 3 thin films, the research directions and development prospects are also discussed.
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
2002年第2期220-234,共15页
Journal of The Chinese Ceramic Society
