摘要
采用多弧离子镀技术沉积氮化钛铝超硬反应膜。考查了沉积工艺参数对膜层组织表面形态的影响 ,进行了显微硬度测定分析及膜层耐磨性实验 ,确定了氮化钛铝超硬反应膜的最佳沉积工艺。
Ti,Al)N super hard films were deposited by multi arc ion plating. The influences of process parameters on the surface morphology of the (Ti,Al)N super hard films are studied. The micro hardness analysis was carried out. And the anti friction property was also tested. The best deposition process was determined to deposit the (Ti,Al)N super hard films.
出处
《真空》
CAS
北大核心
2002年第1期8-10,共3页
Vacuum
