摘要
微机械振动陀螺是新型的惯性元件 .其误差源主要有微机械结构的 Brownian噪声、电路噪声、机械耦合误差 ,以及电子机械耦合误差等 .这些误差严重影响着陀螺仪的精度 .由于制造误差等引起的机械耦合误差 ,可以通过改善陀螺仪的结构来减小耦合误差 .文中从结构设计方面 ,提出单级隔离耦合和双级隔离耦合的结构方案 ,有效减小机械耦合误差 ,提高了精度 .
Micromachined vibrating gyroscope is a new type inertial component. Its error source includes Brownian noise,circuit noise, error of mechanical coupling, and error of electro-mechanical coupling of micromachined structure. These errors seriously affect the precision of gyroscope. Among them, the error of mechanical coupling, which comes from structural unsymmetry due to menufacturing error, can be reduced by improving structure of gyroscope. From structural design, the author proposes structural plan of single spacer coupling and double spacer coupling. By which the error of mechanical coupling can be effectively reduced and the precision can be improved.
出处
《华侨大学学报（自然科学版）》
CAS
2001年第4期380-384,共5页
Journal of Huaqiao University(Natural Science)
基金
福建省自然科学基金资助项目
厦门大学自选课题科研基金资助项目
