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微机械陀螺ASIC接口电路设计 被引量：5

Design of the Micromachined Gyroscope Interface ASIC
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摘要 在分析微机械陀螺接口电路工作原理的基础上,采用中电集团第24研究所的3μm10VP-well标准模拟CMOS工艺设计并制作了微机械陀螺ASIC接口电路.电路HSPICE仿真灵敏度为0.252mV/aF.芯片面积为5.5mm×4.4mm,在此工艺流片并进行了芯片测试.结果表明,在10V电源电压下,其功耗为49.3mW,输出摆幅为4.85±3.1V,输出节点的零点偏离为0.15V.此芯片具有微陀螺驱动及信号检测功能,可实现与微陀螺敏感结构的双片集成. The fundamental principles of the micromachined gyroscope ASIC are discussed. This ASIC is designed and manufactured based on the 3μm 10V P-well standard analog CMOS process. Simulation shows that its sensitivity is 0.252 mV/aF. The chip size is 5.5 mm×4.4 mm. Applying 10 V power, it consumes 49.3mw with 4.85±3.1 V output voltage swing, and its output zero offset is 0.15 V. The chip could drive the gyroscope and detect the weak output signal and has shown its potential to complete the double-chip integrated micromachined gyroscope.
作者 刘晓为 莫冰 王超 谭晓昀 许晓巍 齐向昆
机构地区 哈尔滨工业大学MEMS中心
出处 《传感技术学报》 CAS CSCD 北大核心 2006年第05B期2240-2244,共5页 Chinese Journal of Sensors and Actuators
关键词 CMOS 微机械陀螺 ASIC CMOS micromachined gyroscope ASIC
分类号 TN492 [电子电信—微电子学与固体电子学]
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参考文献11

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二级参考文献14

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共引文献25

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引证文献5

二级引证文献12

传感技术学报
2006年 第05B期

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