摘要
本文介绍研制的新型卧式AFM的工作原理、简要结构、控制电路系统以及Windows/Dos兼容的图像扫描和图像处理软件系统 ,该AFM系统具有良好的图像重复性、稳定性和对比度 ,仪器的分辨率优于 1nm ,扫描范围从 1 0 0nm× 1 0 0nm到 5 μm× 5 μm。本文同时讨论该AFM在铝的阳极氧化抗腐蚀处理过程研究中的应用。我们首次利用AFM对铝的阳极氧化及多孔氧化铝的水封处理全过程进行了扫描检测。实验表明 ,经过水封处理后的多孔氧化铝结构致密、均匀 ,具有理想的抗腐蚀性能。
A new type of horizontal atomic force microscope (AFM) was developed. This article briefly discusses the principle and structure of the horizontal AFM, and introduces its control circuits and software systems for image scanning and processing. The AFM is of high repeatability, reliable stability and ideal contrast for image acquisition, and has a resolution of better than 1nm, covering a scan range from 100 nm×100 nm to 5 μm×5 μm. This work also reports the applications of the AFM in anti-corrosion processing for aluminum surfaces by means of anodic oxidation. A sequence of AFM images of aluminum, porous alumina and obturated alumina was successively obtained during surface processing. It is shown that a uniform film of obturated alumina is of an elegant anti-corrosion property since it can effectively isolate the aluminum substrate from corrosive surroundings.
出处
《浙江工业大学学报》
CAS
2001年第4期341-345,共5页
Journal of Zhejiang University of Technology
