摘要
发展了一种气/液两用型原子力显微镜(AFM)系统,讨论了其工作原理,给出了优化的气/液两用型探头及扫描与反馈控制电路。利用该型AFM系统分别对大气环境下的硅片以及液体环境下的刀片和多孔氧化铝样品进行了扫描检测。实验结果表明,该型AFM系统在大气和液体环境中均可扫描获得理想的AFM图像,分辨力达到纳米量级,扫描范围可达4000nm×4000nm,可满足各种微纳米扫描测量的要求。
A novel atomic force microscope （AFM） system which can be operated both in air and in liquids is developed. In this paper we present the basic principle, optimize the structure of the AFM probe, the scanning and feedback control system. By using the AFM system, the silicon in air, the blade and the porous alumina in liquid were measured successfully. The experimental results show that the system can obtain perfect AFM images either in the air or in the liquid with nano scale resolution, the scanning range can be up to 4000nm× 4000nm, which is satisfied with various kinds of micro/nano scale measurements.
出处
《光学仪器》
2008年第5期61-64,共4页
Optical Instruments
