摘要
针对微机电系统中常用单轴柔性铰链机构原始理论设计的复杂性 ,提出了简洁而准确的单轴柔性铰链设计计算方法。从基础理论出发推导出了柔性铰链刚度及转角设计公式 ,分析了柔性铰链设计中结构参数与性能的关系。通过一种压电驱动微动工作台设计实例分析了单轴柔性铰链机构在微机电系统中的应用。实践证明了该方法的简便。
To avoid the complexity of the design in flexure hinge, one concise and accurate design method is presented for the one axis flexure hinge and a series of calculating equations of rotating rigidities of flexure hinge are deduced. Then the design method and the effect of the design parameters on the performance of one axis flexure hinge are discussed. In the end the application analysis of the one axis flexure hinge in a micro electro mechanical system (MEMS) is carried out through a design example of micro stage actuated by piezoelectric element, and the advantages of the method, time saving and high efficiency, are shown.
出处
《清华大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
2002年第2期172-174,共3页
Journal of Tsinghua University(Science and Technology)
基金
国家自然科学基金资助项目 ( 5 9875 0 5 2 )
