摘要
二氧化硫气体传感器由一组梳状电极和做为电介质覆盖其上的 ,对二氧化硫敏感的有机改性硅酸酯薄膜组成 .梳状电极电容的基材为二氧化硅 ,铝电极以薄膜覆在其上 ,电极的厚度为 1 .6μm电极宽度和间隙为 1 5μm,电极的长度为 1 2 0 0μm,电极总数为 40 0个 .采用溶胶 -凝胶法和自旋涂覆技术形成气敏涂层 .在室温和 1 0 0 Hz,1 k Hz,1 0 k Hz下 ,测定了梳状电极电容器的电容 ,探讨了二氧化硫浓度 ,测量频率和涂膜厚度对传感器灵敏度的影响 .在本实验条件下 ,经有机改性的 N,N-二乙基氨丙基
The SO\-2 gas sensor presented consists of a set of interdigitated electrodes and a thin film of SO\-2 sensitive organically modified silicates which covered the electrodes as a dielectric. The interdigitated capacitances were fabricated in aluminium thin film technology on a silica glass substrate, and electrode thickness of 1.6 μm; electrode width and space distance of 15 μm; length of 1 200 μm; the number of electrodes, 400. The gas sensitive coating is produced with sol gel process and spin on technique. Measurements of capacitance were performed at room temperature for frequencies between 100 Hz and 10 kHz. The influences of sulfur dioxide concentrations, the measurement frequency and the film thickness of silicates on the sensitivity of the sensor to SO\-2 gas were discussed. And organically modified N, N diethylaminopropyl trimethoxysilane had a much higher sensitivity.
出处
《传感技术学报》
CAS
CSCD
2001年第4期265-270,共6页
Chinese Journal of Sensors and Actuators
基金
北京市自然科学基金资助项目 (编号 8992 0 0 5 )
关键词
二氧化硫
气体传感器
梳状电极电容
sulfur dioxide
chemical sensor
interdigitated capacitances
