摘要
对与CMOS工艺兼容的电容式湿度传感器的测量电路进行了分析和仿真,为后期的湿度传感器流片成功提供了有效的保证。该湿度传感器系采用梳状铝电极结构,聚酰亚胺作为感湿介质。比较不同的测量方法,得出最优的测量电路。对测量电路进行理论推导后,对其进行模拟,得出了输出电压与相对湿度的关系图。最后,对该湿度传感器进行版图设计,并分析其后加工工艺。
Measuring eircuct of a capacitive humidity sensor compatible with CMOS technology is analyzed and simulated,as will guarantee a successful tape out of humidity sensor. It uses comb electrodes and polyimide as moisture sensing material. After comparison of different~ measuring means of humidity sensor, an optimized measuring circuit has been put forward. The measuring circuits are theoretically deduced. The measuring circuit is simulated. Relation pattern of output voltage and relative humidity are got. Finally, the layout of this humidity sensor is designed and its post-processing technology is analyzed.
出处
《传感器技术》
CSCD
北大核心
2005年第12期40-42,共3页
Journal of Transducer Technology
基金
国家863计划资助项目(2002AA404010)
关键词
湿度传感器
电容
测量电路
失配
humidity sensor
capacitance
measuring circuit
mismatching
