摘要
针对目前ITO膜In、Sn等材料自然储量少、制备工艺复杂、有毒、稳定性差的缺点 ,提出了代替ITO膜的ZAO薄膜。从该膜的基本性能入手介绍了它的优点 。
Because of the complicated preparing processes,the toxicity and the unsteability,ITO films will be replaced by Zao films.The properties of Zao films are introduced emphatically,its merits are discribed,its applicating prospect and its developing tendency are discussed and its diredction of the reseach is put forward.
出处
《真空与低温》
2001年第3期125-129,共5页
Vacuum and Cryogenics
