摘要
AZO透明导电薄膜是一种半导体氧化物薄膜材料,具有高的载流子浓度和较大的光学禁带宽度,因而具有优异的光电性能,极具应用价值。本文介绍了AZO透明导电薄膜的晶体结构和光电特性,综述了国内外对AZO薄膜所开展的研究工作,并简要地介绍了AZO薄膜的实际应用。
AZO transparent conductive thin film is one of semi-conductive oxide films. Due to both high carrier concentration and large optical band gap,AZO thin film has excellent electrical and optical properties, and is regarded as a potential transparent conductive thin film. In this paper, the microstructure, electrical and optical properties of AZO thin film are introduced, the research results on AZO thin film all over the world are described, and some AZO thin film applications are presented.
出处
《真空电子技术》
2004年第6期51-54,共4页
Vacuum Electronics
关键词
AZO薄膜
光电特性
禁带宽度
AZO thin film
Optical and electronical properties
Band gap
