摘要
在现代大型微电子工业用超纯水系统中二级反渗透 + N2 配合真空膜脱气 +三级混床的工艺属当今最新开发的工艺 ,在大型系统中应用很少 ,我们通过三年多的不断摸索、实践和优化改进 ,最终将该套具有技术先进、投资少、结构紧凑、出水量大、品质高等特点的水系统很成功地稳定运行 ,解决了工艺流程中的缺陷和不足 。
The technical process of two-stage RO+vacuum membrane degasifying +three-stage mixed bed, the newest developing technical process nowaydays for preparing ultra-pure water, has been less applied in large-scale system. Through optimization and improvement, the author developed the system, which possesses the advantages of advanced technique,less investment, compact structure, great output and high quality; it has operated successfully and stably to solv some shortcomings and better control the operating cost.
出处
《水处理技术》
CAS
CSCD
北大核心
2001年第5期296-299,共4页
Technology of Water Treatment
