摘要
较详细地讨论了夫朗和费衍射的本质、夫朗和费近似的准确含义以及倾斜因子对衍射花样的影响。从不同的角度导出了单缝夫朗和费衍射的光强公式和测量公式 ,指出了这些公式之间的区别与联系以及傅里叶光学中作近似分析时存在的问题。认为文献 [1]、[3 ]得出错误结论的深层次原因是错误地理解了夫朗和费近似的概念。当用夫朗和费衍射测量微小物体的尺寸时 ,只要正确地应用测量公式 ,便能得到准确的测量结果。测量的准确度原则上与衍射角的大小及被测物的尺寸无关 。
The essence of Fraunhofer diffraction,the accurate meaning of Fraunhofer approximation and the impact of inclination factor upon Frounhofer diffraction pattern are discussed in some detail The light intensity formulas and the measurement formulas of slit Fraunhofer diffraction are derived by different means The distinction and interrelation about these formulas and the faults of approximate analysis in Fourier Optics are pointed out That the real cause made a wrong conclusion in papers and is the author misunderstands the concept of Fraunhofer approximation is thought It shows that the measurement correctness by Fraunhofer diffraction is independent of the dimension of a small object and the size of the diffraction angle The minimum measurable dimension is only dependent on the scope of application of the scalar theory Within the limits permitted by the scalar theory, provided that the measurement formula is correctly applied, an accurate result for the measurement can be obtained
出处
《光学技术》
CAS
CSCD
2001年第5期472-476,480,共6页
Optical Technique
关键词
测量
夫朗和费近似
夫朗和费衍射
准确性
diffraction
measurement
correctness
Fraunhofer approximation
