摘要
利用流体动力学模型 ,研究了围绕菱形靶的等离子体鞘层扩展 .通过改变靶的形状 ,考察了不同角度外角对鞘层的时空演化及等离子体参量的影响 .结果表明 ,外角愈尖锐 ,鞘层扩展速度愈慢 ,而参考平面处鞘层扩展速度最快 ,因而使鞘层有向圆柱形扩展的趋势 ;尽管尖锐的外角处电荷密度高 ,会吸引较多的离子轰击该处 。
In this paper, plasma based ion implantation of a diamond shaped target was simulated using a fluid dynamic model. The effects of the target shape on plasma sheath evolution and the implanted ion parameters have been studied. The simulation results show that the more acute is the convex angle, the more slow is the sheath expanding rate, and the expanding rate at the reference plane is the fastest, so that the sheath edge has a tendency to evolve into a cylindrical shape. The acute convex angle has a high electric charge density on its surface, which would absorb more impacting ions, but the nonperpendicular impact would reduce the implanted dose markedly.
出处
《材料科学与工艺》
EI
CAS
CSCD
2001年第3期250-252,共3页
Materials Science and Technology
