摘要
提出了一种单发实验测量软 X射线波段多层膜反射镜反射特性的简易方法。实验采用激光等离子体软 X射线源作为光源 ,用平焦场光栅谱仪分光 ,在光路中引入掠入射镜以消除高级次谱的影响 ,用软 X光 CCD记录 ,在一发激光打靶实验中 ,测量了设计中心波长为 1 3 .9nm的
A new method of single-shot measurement of normal incidence soft X-ray Mo/Si multilayer mirror's reflectance was proposed. Experiment were performed by using laser-produced plasma X-ray source, flat field grating spectrometer and soft X-ray CCD. Grazing incident mirror was employed to eliminate high-order contribution. Wavelength was accurately determined by the 17.04 nm L-edge of Al filter. Measurements of Mo/Si multilayer mirror showed a peak reflectance of 35% at 14 nm with a 0.5 nm bandwidth.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2001年第5期525-528,共4页
High Power Laser and Particle Beams
基金
国家 8 63激光技术领域资助课题 (863 -4 10 -3 .3
