摘要
本文详细分析了用各向异性腐蚀技术形成的压阻式压力传感器硅杯的几种腐蚀方法 ,根据实验提出了它们的优缺点 ,介绍了几种各向异性蚀的自致停止法和腐蚀中削角的补偿方法 ,对制造微量程、高灵敏度的压力传感器有一定的指导意义 .
This paper analyses some kinds of etching ways that form piezoresistive pressure sensor silicon cup by anisotropic etching technology, and enumerates their merits and faults according to the experiments. This paper also introduces some kinds of autostop technologies of anisotropic etching and compensative ways of chamfer in etching, which have an instructive meaning of fabricating micro range and high sensitivity pressure sensor.
出处
《传感技术学报》
CAS
CSCD
2001年第2期140-146,共7页
Chinese Journal of Sensors and Actuators
