摘要
本文对Ｇ．Ｋ．Ｍａｙｅｒ等人提出的，用（１００）条对（１００）Ｓｉ凸角补偿的方法进行了深入研究，指出了该方法在腐蚀槽较窄时的局限性，在此基础上提出了一种改进的新方法，并给出了理论分析及实验结果．
Abstract The method of convex corner compensation with (100) bar for silicon presented by G. K. Mayer, et al has been investigated. The limitations of the method is indicated,and a modified method is put forward, the results of theoretic analysis and experiment have been presented.
基金
国家自然科学基金
