摘要
本文报导将非晶碳氢膜(a-C:H)用作红外反射镜Au/Cu的表面保护膜的设计计算、实验室制备工艺研究、及有关性能测试结果。我们的第一阶段工作结果表明,a-C:H/Au/Cu在实用上是有价值的,值得继续进行工作。
This article reports the design and calculation of the protective layer of hydrogenated amorphous carbon film(a-C:H)on Au/Cu IR-reflecting mirrors. The research on the laboratory fabrication technique and the results of measurements on the performences of a-C:H/Au/Cu laboratory samples are also reported. Our first step study has shown that a-C:H/Au/Cu is valuabb in application and -worth to be studied further.
出处
《激光杂志》
CAS
CSCD
北大核心
1991年第2期64-68,共5页
Laser Journal
关键词
红外射镜
非晶碳氢膜
工艺
设计
hydrogcnated amorphous carbon film(a-C:H) protective layer IR-reflecting mirror
