摘要
以0.5μm技术之需而设的一套超纯水精处理系统为实例,介绍其工艺流程及其特点,给出各项水质参数的实测数据,进而述评≤0.25μm/8″线的水质评价项目及其限定值、分析手段和在线检测仪表。
Taking the ultrapure water polishing system designed for 0.5 -micron technology as an example, the process flow and characteristics for ultrapure water polishging are described, the measurements of the water quality are reviewed, and the parameters, limited values, analysis methods and necessary on -line measurement instruments for evaluation of the water quality for a ≤0.25μm/8' production line are presented.
出处
《洁净与空调技术》
2001年第2期2-6,32,共6页
Contamination Control & Air-Conditioning Technology
关键词
超纯水
水质评价
在线检测仪表
Ultrapure water Plishing Water quality Instrument
