摘要
综述利用微加工技术制作微型反射镜阵列 ;简要叙述其发展历程 ,着重阐述其主要功能和优点。分类分析微镜阵列的基本工作方式和主要应用领域及其发展方向 。
The micromirror arrays using MOEMS(micro opto electro mechanical system) fabrication process are reviewed. The history of the development,the basic function and the advantages of the micromirror arrays are presented briefly. Their future applications and the future market are analysized.
出处
《激光与光电子学进展》
CSCD
2001年第4期40-45,共6页
Laser & Optoelectronics Progress
