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光学MEMS微镜技术及其在激光雷达中的应用 被引量:11

MOEMS Microlens Technique and Its Application on Lidar
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摘要 首先概述了MOEMS光学技术的应用及特点,并介绍一类MOEMS光学产品的机理,该技术使得三维实时扫描成像激光雷达小型化成为可能。重点论述一个MEMS激光雷达设计实例,比较其与FLASH激光雷达工作原理的异同,列举了其潜在性能指标。 Application and characteristics of MOEMS technique is summarized in this paper.The mechanism of a type of MOEMS optical products is introduced.This technique is likely to miniaturize 3D real time scan imaging lidar.A design instance of MEMS lidar is stressed.Similarities and differences of operating principle between the MEMS lidar and FLASH lidar are compared.Potential performance index of the MEMS lidar is listed.
出处 《中国电子科学研究院学报》 2011年第1期36-38,共3页 Journal of China Academy of Electronics and Information Technology
关键词 MOEMS MEMS 激光雷达 实时成像 MOEMS MEMS lidar real time imaging
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