摘要
本文从静电微反射镜结构、驱动方式、加工工艺等方面对目前静电微反射镜的原理和实现方法进行总结,分别讨论了它们的功能特点和应用方向,分析了不同应用领域的静电微反射镜的性能要求和结构方式,重点介绍了静电微反射镜在投影显示器和空间光通信等领域的应用,最后讨论了静电微反射镜在光学特性分析、驱动方式、工艺设计、动态特性和控制方法等方面的关键问题及发展方向。
The principle and the realization method of electrostatic micro - mirrors are summarized in this paper, including mirror-array structures, optical principle, driver types, structures and the fabrication processes. The functional properties and application directions are discussed respectively. Meanwhile, the performance requirements and the structure characters of the electrostatic micro - mirrors used in different areas are presented. The application of the electrostatic micro - mirrors in projection display and special optical communication are presented in detail. Finally, the key research problems and the developing directions in optical characteristics analysis, driving mode, fabrication processes, dynamic analvsis and control method are discussed.
出处
《激光杂志》
CAS
CSCD
北大核心
2006年第6期3-5,共3页
Laser Journal
关键词
微光机电系统
静电微反射镜
静电驱动器
角锥棱镜
衍射
MOEMS
electrostatic micro reflective mirror
electrostatic driver
cube comer rectroreflector
diffraction
