摘要
为解决目前常用电容式湿度传感器存在的误差较大和一致性较差的问题,提出了采用常压化学气相淀积(APCVD)法制备的多孔SiO2膜作为吸湿材料的乐甫波声表面波(SAW)传感器感知湿度。基片采用42.75°旋转Y轴切割石英材料,乐甫波传播方向为[0°,132.75°,90°],SiO2湿敏膜厚度为0.5μm。实验结果表明:此湿度传感器灵敏度约为62 kHz/RH%,在相对湿度为50%时,最大湿滞约3%。测得的湿敏特性和迟滞特性表明,乐甫波声表面波湿度传感器线性度较好,实验证实该湿度传感器具有很好的应用前景。
Abstract： In order to solve the problems of the large error and poor uniformity for the common capacitive humidity sensor, the Love wave based surface acoustic wave （SAW） humidity sensor with the porous SiO2 film as the hygroscopic material was presented by the atmospheric-pressure chemical vapor deposition （APCVD） and perceived humidity. The quartz substrate was cut by rotating Y-axis at 42.75°. The propagation direction of the Love wave is [0°, 132.75°, 90°], and the thickness of the SiO2 humidity sensitive film is 0.5 μm. The experimental results show that the sensitivity of the humidity sensor is about 62 kHz/RH%, and the maximum hysteresis is about 3 % at the relative humidity of 50%. The measured humidity sensitive properties and hys- teresis characteristics show that the linearity of the Love wave based SAW humidity sensor is bet- ter. The experiment proves that the humidity sensor has a very good application prospect.
出处
《微纳电子技术》
CAS
北大核心
2014年第2期115-119,共5页
Micronanoelectronic Technology
基金
江苏基础研究计划资助项目(SBK200930229)
