摘要
与声表面波器件和兰姆波器件相比,乐甫波器件用于液体检测时有其独特的优势。从液体的波动特性入手,建立了"压电基片-非压电薄膜-液体"3层结构的乐甫波理论模型;基于上述模型,以钽酸锂作为压电基片材料,SU-8光刻胶作为薄膜材料,实际制作了乐甫波器件;基于相位差测量方法和幅频特性测量方法搭建了测试电路,并针对不同比例的纯水和酒精混合溶液进行了测试,实验结果表明了乐甫波器件测试系统应用于液体介电常数检测的有效性。
Compared with surface acoustic wave device advantages. Starting with liquid wave characteristic, the and Lamb wave device, the Love wave device has its unique Love wave theoretical model with three layer structure including ＇ piezoelectric substrate, non-piezoelectric film and liquid＇ is established. Based on the model, the liquid dielectric constant sensing characteristic of Love wave is studied in simulation, and corresponding optimization design of Love wave device is analyzed according to sensitivity and electro-mechanical coupling coefficient. A Love wave device consisting of 36°YX LiTaO3 and SU-8 photoresist film was fabricated. The measurement circuits were built based on the phase difference measurement method and amplitude-frequency characteristic measurement method. Experiment tests on the mixed liquid samples of pure water and alcohol with different ratios were conducted ; the experimental resuhs are in accordance with the numerical simulation, test system in liquid dielectric constant measurement. which proves the effectiveness of the proposed love wave device
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2012年第11期2523-2528,共6页
Chinese Journal of Scientific Instrument
基金
国家自然科学基金(51005121)
航空科学基金(2010ZD52045)
江苏省科技支撑计划工业项目(BE2011180)
南京航空航天大学基本科研业务费专项科研项目(56XZA11012)
江苏高校优势学科建设工程资助项目
关键词
乐甫波
液体介电常数
相位差测量
幅频特性测量
Love wave
liquid dielectric constant
phase difference measurement
amplitudefrequency characteris-tic measurement
