摘要
基于光栅衍射的横向剪切干涉仪具有很高的检测精度,为满足相移的需要,光栅移相装置需要拥有较大的行程,是干涉仪的关键器件之一。根据干涉仪需求设计了基于柔性铰链及桥式放大机构并利用压电陶瓷驱动的光栅移相装置,利用有限元分析方法对其受力和形变特性进行了分析。利用PI公司的电容传感器及数字压电控制器搭建了测试平台对其进行了测试,获得了开环条件下迟滞特性曲线,在输出电压为100 V时,光栅移相装置的行程可达225μm。实验结果表明,光栅移相装置的行程与理论设计指标接近,满足设计要求。
The grating phase shifting device is one of the key components of the lateral sheafing interferometer with high accuracy based on grating diffraction , which requires large travel range to meet the phase shift requirements. Designed the grating phase shifting device based on flexible hinge and bridge amplification mechanism and driven by PZT according to the needs of the interferometer. The force ar/d deformation characteristics of the grating phase shifting device were analyzed by the finite element analysis method. The test platform are established to test the it by the capacitive sensor and digital piezo controllers of PI corporation and open-loop hysteresis characteristic curve is obtained. When the output voltage is 100 V, the grating phase shift device travels up to 225 μm. The experimental results indicate that the travel range of the grating phase shift device close the design targets, can meet the design requirement.
出处
《电子测量与仪器学报》
CSCD
2013年第11期1099-1104,共6页
Journal of Electronic Measurement and Instrumentation
基金
国家科技重大专项(2009ZX02202)资助项目
关键词
剪切干涉
光栅移相
压电陶瓷
有限元
shearing interferometry
grating phase shifting
PZT
finite element
